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BONDMASTER
VACUUM/CONTROLLED ATMOSPHERE
FURNACES FOR REACTION BONDING OF
SILICON NITRIDE OR SILICON CARBIDE
General
Description
Bondmaster furnaces are designed for reaction bonding of silicon
nitride or silicon carbide ceramics. Furnaces are rated to 1500°C for gas phase bonding
of silicon nitride and related materials and to 2200°C for liquid phase bonding of
silicon carbide.
Each furnace is supplied as a complete system including: vacuum
chamber; heat zone; power supply; vacuum pump; and a programmable control system. Gas flow
control systems are included with 1500°C furnaces. Additional options and upgrades are
available to meet individual requirements.
Top Loader
(Model 612) |
Front Loader
(Model 121212) |
Bottom Loader
(Model 1624) |
Chamber
and Heat Zone
Standard Bondmaster vacuum vessels are made of mild steel which is
coated internally to inhibit oxidation and improve vacuum performance. Stainless steel
chambers, water jacket and flanges are optionally available for areas with poor water
quality or when the ultimate in cleanliness is required.
Furnaces rated to 2200°C for processing silicon carbide are provided
with graphite heating elements and graphite insulation. Furnaces rated to 1500°C for
silicon nitride can be furnished with either graphite or metallic heat zones. Metallic
heat zones use tungsten heating elements which are resistant to silicide formation.
Similarly, a tungsten inner radiation shield is used instead of molybdenum to prevent
interaction and prolong heat zone life.
Model 612M
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Model 121224G
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Loading |
Work-Zone
(inches) |
Work
Volume
(cubic feet) |
Hearth
Capacity
(lbs) |
Power*
Supply
(KVA) |
Vacuum
Pump
(cfm) |
Relative
Price |
Model
Number |
Top |
5ø x 10 |
0.1 |
10 |
20/40 |
16 |
1.0 |
612 |
Top |
10ø x 14 |
0.6 |
50 |
40/60 |
27 |
1.1 |
1218 |
Front |
12 x 12 x 12 |
1.0 |
100 |
60/80 |
27 |
1.2 |
121212 |
Bottom |
13ø x 18 |
1.4 |
150 |
80/110 |
50 |
1.6 |
1624 |
Front |
12 x 12 x 24 |
2.0 |
200 |
100/140 |
50 |
1.5 |
121224 |
*1500°C/2200°C
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Atmosphere Control
Bondmaster furnaces are supplied with two stage mechanical vacuum pumps
for rapid chamber evacuation to 0.1 torr in approximately five minutes. High vacuum
diffusion, cryogenic, or turbomolecular pumps can be provided on request.
Gas phase bonding furnaces are provided with gas flow control systems
including pressure interlocks to prevent runaway gas consumption. Optional gas pressure
control systems are available for fully automatic operation, complete with a flow
interlock for protection from excessive reaction rates. A flow totalizer can also be added
to log total gas consumption and signal run completion.
Liquid phase bonding furnaces are not provided with nitrogen gas demand
systems on standard models. An automatic backfill system is included for processing near
atmospheric pressure with inert gas. Both gas pressure and gas flow control systems are
optionally available.
Bondmaster furnaces must be equipped with a hydrogen gas safety system
if explosive concentrations of reducing gases will be present. This optional system
includes a blowoff port, burnoff tower, and extensive safety interlocks.
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Standard
Gas Flow Control System
Optional Gas Pressure Control System
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Special Features
Either tungsten or graphite elements for long life
- Durable tungsten key shield on metallic heat zones
- Choice of gas flow control or pressure control systems
- Automatic protection from runaway exothermic reactions
- Convenient loading format – either top, front, or bottom
- Optional graphite retort for vapor containment
- Complete instrumentation package including temperature sensor, programmable
microprocessor, and gas controls
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Power
Supply
Two different power supplies are
available for each standard Bondmaster, depending on whether the furnace will be used to
1500°C or 2200°C. Each supply is generously sized with ample reserves for load heatup
and compensation for heat zone aging. See table at right for typical heat zone power
consumption at full temperature.
Larger supplies are optionally available for rapid heatup of heavy
loads or operation backfilled with hydrogen rich gas mixtures. |
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Approximate Power
Consumption |
|
Model |
(KVA) |
Number |
1500°C1 |
1500°C2 |
2200°C2 |
612 |
10 |
10 |
20 |
1218 |
25 |
20 |
40 |
121212 |
35 |
25 |
55 |
1624 |
45 |
35 |
70 |
121224 |
55 |
45 |
90 |
Notes:
1. Metallic heat zone with one atmosphere of nitrogen.
2. Graphite heat zone with one atmosphere of N2
or Ar
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Instrumentation
Microprocessor based programmable controllers are provided for all
furnaces. The standard controller is capable of storing ten ramp and ten soak segments as
well as two process events such as pumpdown or backfill. Controllers with more extensive
capabilities are optionally available, as well as custom designed control systems to meet
any requirement.
An infrared pyrometer is provided for all 2200°C furnaces, and a
tungsten rhenium thermocouple for all 1500°C furnaces. Independent over-temperature
control systems using either a thermocouple or power transducer are optionally available.
Two thermocouple gauges measure vacuum and a PLC coordinates system functions and provides
safety interlocks.
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- microprocessor
- pyrometer or TC
- gas control
- TC gauges
- programmable logic controller
- voltmeters
- ammeters
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1500 PSI
Reaction bonding can be performed with internal furnace pressures up to
1500 psi. Thermal Technology’s Pressuremaster furnaces use graphite heat zones and
ASME code stamped pressure vessels for safe and reliable high temperature processing. Four
standard furnace models are available with capacities from 0.1 ft3 to 3.5 ft3.
Reactive gas supply systems will be designed to meet individual requirements.
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| Custom Furnace Design
Thermal Technology has been a leading supplier of reaction
bonding furnaces for more than ten years. Building on this experience, our engineering
team can design a custom furnace system to meet your exact requirements. When your needs
exceed the capabilities of our standard models, you can count on receiving the same
quality and reliability in a customized system.
Extensive design, fabrication, and testing skills are available for use
in developing furnaces built for a specific application. Our custom designed furnaces are
located at National Laboratories and major corporations around the world. When you need
the best—call Thermal Technology. |
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BONDMASTER Installation Data
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Model
Number |
Layout1
WxDxH
(feet) |
Electrical2
460V, 30, 60 Hz
(kVA) |
Water2,3
(gpm) |
612 |
6x6x6 |
30/50 |
4/8 |
1218 |
6x6x6 |
50/80 |
8/12 |
121212 |
6x6x6 |
80/100 |
12/16 |
1624 |
7x7x8 |
100/130 |
16/22 |
121224 |
6x7x6 |
120/160 |
20/28 |
Notes:
Includes furnace, power supply, control cabinet,
and pumping system. Exact dimensions depend on choice of accessories. Components can be
re-arranged to different dimensions to suit individual requirements.
Alternate power supplies, pumps, and fans may
require different inputs.
Water must be clean and free of contamination and
minerals, regulated to 50psig, and 70°F maximum temperature.
All Specifications are subject to change. Final
quotation will be the governing documents in all case. |
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cards.