| 1.0 |
Model 7215-CIB Czochralski crystal grower system
includes the following major components. |
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1.1 |
Stainless steel chamber, “bell” type, fully water jacketed for heat dissipation, 30” ID x 36” high. The top lid and the bell vessel lift completely clear of the crucible, coil and furniture to provide easy access for the assembly, removal of crystal, cleaning and maintenance. |
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Note: Chamber dimensions can be modified to suit customer’s specific crystal growing requirement. |
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1.1.1 |
Top lid closure with inner copper coldwall. Ports are provided for pull rod, visual process observation (1), hot loading of crucible, optional optical pyrometer and optional CCD camera. |
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1.2 |
Structural steel base includes copper coldwall and ports for power feedthrough and crucible lift rod and support column of massive construction to provide stability incorporating: chamber support, crystal lift lead screw and guide-rod assembly with drive motor.
| Crystal lift speed |
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stepper motor drive, 0-100 mm/min |
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travel 39” |
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1.3 |
Czochralski crystal grower pull-rod rotation and load cell assembly. The load cell is an HBM Model C3H3 rated at 20 kg, sized for a 10 kg crystal.
Note: Other sizes of load cell can be supplied to meet customer’s specific requirement.
The load cell is mounted to a rigid plate extending from the lead screw assembly. This plate also supports the pull-rod air bearing and a pivot that supports a counter-balanced plate on which is mounted the pull-rod rotation motor. Rotation speed 0-60 rpm.
The pull rod is connected to the rotation motor by two universal joints in series located between the motor and the air bearing. Between the air bearing and the seed rod connection is an X-Y adjustment to permit centering the seed crystal in the thermal center of the melt. The pull rod will be supplied with a threaded end, or a diametrically drilled hole, or can be just plain round to accommodate the customer’s seed rod arrangement (please specify on order). |
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1.4 |
R.F. induction power supply rated at 50 kW, 10 kHz with an 13.5” ID x 2” high coil, water-cooled leads and a power feedthrough port.
Note: Other power supply kW ratings and coil dimensions can be supplied if required. |
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1.5 |
Motor controls for manual override and maintenance. |
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1.6 |
Gas flow controls, manually adjusted flowmeters (2), one for nitrogen/ inert and one for oxygen. |
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1.7 |
Automatic diameter control system including software,
PC, 17” color monitor interfaced to the load cell, power supply and motor controls. (Software based on “LabVIEW.”)
Note: No crucibles, insulating ceramics or after heater arrangement included. We can supply these items if requested. |
| 2.0 |
Options: |
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2.1 |
Crucible lift lead screw and guide rod assembly with drive motor.
| Crucible lift speed |
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stepper motor drive, 0-100 mm/min |
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travel
6” |
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2.2 |
Video observation system including a CCD camera, viewing prism and a 9” black and white monitor. |
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2.3 |
Neslab constant temperature water recirculator and water traced cuff to maintain uniform temperature of load cell. |
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2.4 |
Hot zone ceramics and after heater designed for customer’s specific requirement. |
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2.5 |
Water-to-water heat exchanger rated to handle one system, with full capacity standby pump. This system also includes a pneumatic pump to maintain water flow through the furnace chamber in the event of electric power failure. |
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Note: These specifications are generic in nature and will be
changed to meet customer's exact requirements. |
cards.