| Model
7004-CI Czochralski crystal grower system includes the
following major components:
|
| 1.0 |
Unsealed, stainless steel pulling chamber with full opening door (note: with the addition of a bellows assembly the chamber can be made vacuum tight). The chamber is fully water jacketed for heat dissipation. Ports are provided for a pull rod (1), vacuum pump (1), optical pyrometer (1), and visual process observation (1). A blanked port is included in the bottom of the chamber to allow conversion to crucible rotation, or Bridgman growth, should this ever be needed. Chamber is approximately 12" wide x 16" high x 10" deep. |
| 2.0 |
Czochralski crystal grower rotation and pull assembly. Mounts on top of chamber. Includes pull rod with end adapted to suit customer supplied seed rod, rack-mounted motor speed controls, automatic diameter control utilizing a load-cell to measure the weight of the crystal as a controlling parameter. Computer controlled rotation, speed and diameter of crystal.
| Lift
speed: |
0.1
- 10 mm/hr low range or 1.0 - 50 mm/
hr high range |
| Rapid
advance: |
100
mm/min |
| Rotation
speed: |
0
- 50 rpm |
| Maximum
travel: |
10" |
| Speed
stability: |
1%
of set speed |
|
| |
2.1 |
PC with
monitor |
| |
2.2 |
ADC
software for the crystal grower based on “LabVIEW.”
|
|
3.0 |
Gas control and mixing system.
This allows precise control of gas atmosphere flow to the chamber for experiments, which require a sealed environment. |
|
3.1 |
Two
(2) Brooks 0-5 lpm flowmeters pre-calibrated for nitrogen and
argon.
|
|
3.2 |
Two
(2) inlet gas pressure gauges with manual shutoff valve. |
|
3.3 |
Gas
mixing plenum.
|
|
3.4 |
Gas
vent bubbler system. |
|
4.0 |
25 kW output power supply,
Powell Model MF25 (or equal), 100% solid state RF, induction load coil and water-cooled busswork.
Includes a NEMA 12 cabinet housing all RF components. Frequency is 30 kHz and meters are provided to monitor output power, output current, coil voltage and frequency.
Requires 4 gpm cooling water, 60 psig, at 95°F maximum temperature. Input power requirement is 30 kVA, 240 VAC, 3 phase.
The induction load coil will be designed and sized for a 2 1/2" OD x 2 1/2" high crucible with 3/4” allowance on the inside diameter of the coil for suitable ceramic insulation.
Note: No crucible or hot zone ceramics included with this system. (We can supply if requested.) |
|
5.0 |
System
controls are contained in a 19" rack that also contains a
control power transformer and the manual puller motor controls. |
|
6.0 |
Video
display system, including:
a)
CCD camera - high resolution (570 line)
b)
Zoom lens - Fujinon 6x12
c)
Close-up lens
d) Heat radiation
filter
e) 12" monitor -
Panasonic
The
system will be fully assembled and tested at Thermal Technology, Santa Rosa, California.
Customer is invited to attend a demonstration test of the
equipment prior to shipment for operational training and
maintenance instruction.
|
|
7.0 |
Utilities
|
|
7.1 |
Electrical:
240 volt, 60 Hz, 3 phase, 35 kVA, 100 amp service.
|
|
7.2 |
Water: cooling water 4 gallons/minute (15 l/min), clean and pure at 18-30şC. |
|
7.3 |
Gas:
as required for process, regulated at 10 psi (0.8 Kg/Cm2)
|
|
8.0 |
Options
|
|
8.1 |
Water-to-water
heat exchanger rated sized to handle one Model 7004-CI system,
with a full capacity stand-by pump.
(The water supply to the power supply and coil must be
clean and of low electrical resistance.)
|
|
Note: These specifications are
generic in nature and will be changed to meet customer's exact
requirements. |
cards.